Abstract:With an integrated resonance exciting heater and a self-sensing piezoresistor, resonant micro-cantilever bio/chemical sensors are optimally designed and fabricated by micromachining techniques. This study is emphasized on the optimization of the integrated heating resistor. Previous research has put the heater at either the cantilever clamp end, the midpoint or the free end. Aiming at sufficiently high and stable resonant amplitude, our research indicates that the optimized location of the thermal-electric exciting resistor is the clamp end instead of other positions. By both theoretical analysis and resonance experiments where three heating resistors are placed at the three locations of the fabricated cantilever, it is clarified that the clamp end heating provides the most efficient resonance excitation in terms of resonant amplitude, Q-factor and resonance stability. Besides, the optimized combination of dc bias and ac voltage is determined by both analysis and experimental verification. With the optimized heating excitation, the resonant cantilever is used for biotin-avidin-specific detection, resulting in a +/-0.1 Hz ultra-low noise floor of the frequency signal and a 130 fg mass resolution. In addition to resonance excitation, the heater is used to heat up the cantilever for speed-up desorption after detection that helps rapid and repeated sensing to chemical vapor. The clamp end is determined (by simulation) as the optimal heating location for uniform temperature distribution on the cantilever. Using the resonant cantilever, a rapid and repeated sensing experiment on dimethyl methylphosphonate (DMMP) vapor shows that a short-period heating at the detection interval significantly quickens the signal recovery and enhances the sensing repeatability.

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