Digitalization Measurement Of Structure Parameters Of Optic Low-Pass Filter

YunChuan Li,Bin Lin,Zhuangfei Wu,Liewei Zhu,Xiangqun Cao
DOI: https://doi.org/10.1117/12.676417
2006-01-01
Abstract:A digitalization measurement method of structure parameters of optical low-pass filter (OLPF) is presented in this paper. OLPF which comprises two or three crystal plates is adopted in front of the CCD to reduce aliasing in a digitized image. Transiting a triple plate OLPF, an object of the point-source light can separate into eight points which are imaged in CMOS array. The distance of point to point provides us with the information of thickness of each crystal plate. The accuracy of measurement is better than 0.15 mu m.
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