Abstract:The distributed feedback (DFB) laser is a key component for fiber communication due to its single-mode performance, but it usually requires complex and expensive regrowth after grating definition. The laterally-coupled distributed feedback (LC-DFB) laser has the advantage of a simple fabrication process without epitaxial regrowth, but the LC-DFB laser usually has a low coupling coefficient as the optical feedback is provided by the evanescent field and Fabry-Parot (FP) longitudinal modes arise from the pair of parallel cleaved facets. In this work, a triangular prism etched facet is proposed to suppress the FP longitudinal modes from cleaved facets of a 1.3 mu m LC-DFB laser. The length-width ratio of a triangular prism facet is optimized on the compromise between the reflection and length by finite difference time domain (FDTD) method. The vertical etched facet with depth of 4 mu m and tip curvature of 100 nm and the lateral gratings with depth of 1.8 mu m and gap of 200 nm are fabricated by inductively coupled plasma (ICP) etching with the gas mixtures of Cl-2/CH4/Ar and CH4/H-2/Ar, respectively. The FP longitudinal modes of the etched-facet laterally-coupled distributed feedback (EF-LC-DFB) laser are effectively suppressed compared to the counterpart of cleaved facets, and the stable single-mode operation of EF-LC-DFB is demonstrated with the side mode suppression ratio (SMSR) of 54.35 dB.

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