Design and testing of a novel multipath-actuation compliant manipulator
Xu Yang,Lichao Ji,Wule Zhu,Ying Shang,Shizhen Li
DOI: https://doi.org/10.1088/1361-6439/ac404c
2021-12-28
Journal of Micromechanics and Microengineering
Abstract:Abstract In this paper, a novel multipath-actuation compliant manipulator (MCM) driven by piezoelectric actuators is proposed. Specifically, the monolithic MCM employs two vertically arranged compliant limbs with multipath motion transmission to actuate a symmetrically constrained planar mechanism, realizing x - and y -directional motion. For each limb, the multiple branched chains are configured in different paths but all contribute to the output motion, which results in a large displacement amplification ratio as well as a high working bandwidth. The ideal motion transmission of the proposed MCM is revealed by a specially established rigid-body kinematics model. Finite element analysis is carried out to predict the realistic static and dynamic performance of designed MCM. Moreover, a monolithic MCM prototype is fabricated, which is demonstrated to have a large displacement amplification ratio of 11.05, a high resonance frequency of 969 Hz, and a fine motion resolution of 25.48 nm. With promising static and dynamic characteristics, the proposed MCM can be widely used in practical applications.
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied