The kinematics calibration of a planar parallel manipulator

Jonhong Ji,YuHong Zhu,Lining Sun
2006-01-01
Abstract:The kinematics calibration of a planar parallel manipulator of planar 5-links, whose potential applications include micro-electromechanical systems (MEMS) assembling or bonding is developed. The laser interferometer whose resolution is about 10 nanometers is adopted for measuring the kinematics model. When the manipulator moves, the movement along the normal directions of the mirrors can be measured by two laser interferometers. The extended Kalman filter (EKF) is adopted for estimation, because of its advantages to treat non-linear system and to supply the estimation with uncertainty together.
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