A Proportional Resonant Controller With Switching Scheme for Cross-Coupling Compensation in AFM Sinusoidal Scanning
Linlin Li,Yixuan Meng,Xiangyuan Wang,Sumeet S. Aphale,LiMin Zhu
DOI: https://doi.org/10.1109/tim.2024.3484509
IF: 5.6
2024-11-09
IEEE Transactions on Instrumentation and Measurement
Abstract:Sinusoidal scanning holds promise for boosting AFM imaging bandwidth, where the fast axis tracks the sinusoids and the slow axis tracks the corresponding staircase trajectories, yet simplifying the handling of cross-coupling effects between scanning axes remains essential. Particularly challenging is the coupling from the fast axis to the slow axis, exacerbating tracking trajectory deviations during high-speed scanning. To address this, we propose positioning a proportional resonant controller (PRC) strategically at frequencies corresponding to coupling error locations in the slow axis, complementing the baseline tracking controller. Leveraging the vector margin method, we offer a systematic stability analysis. However, real-time implementations reveal disruptions in PRC when tracking staircase trajectories, deteriorating the original tracking performance. To counter this, we propose a switching scheme (SS) to isolate disturbances by reconfiguring each resonant controller into an online-learned signal generator postconvergence. Our investigation confirms a compensation signal difference rate below 0.2%. Through comprehensive experiments, we demonstrate a significant reduction in the coupled errors, from 402.7 nm (open loop) and 444.7 nm (baseline tracking controller) to 8.7 nm at 100 Hz scanning frequency. The resulting tracking accuracy matches that achieved with the fast axis decoupled (shut off, which is regarded as the original tracking performance). The proposed PRC+SS approach, being model-free and capable of online self-learning, is easily deployable in systems with complex dynamics, ensuring sustained performance enhancement.
engineering, electrical & electronic,instruments & instrumentation