Abstract:The diffraction efficiencies of a Fresnel zone plate (ZP), fabricated by Xradia Inc. using the electron-beam writing technique, were measured using polarized, monochromatic synchrotron radiation in the extreme ultraviolet wavelength range 3.4-22 nm. The ZP had 2 mm diameter, 3330 zones, 150 run outer zone width, and a 1 mm central occulter. The ZP was supported by a 100 rim thick Si3N4 membrane. The diffraction patterns were recorded by CMOS imagers with phosphor coatings and with 5.2 mu m or 48 mu m pixels. The focused +n orders (n=1-4), the diverging -1 order, and the undiffracted 0 order were observed as functions of wavelength and off-axis tilt angle. Sub-pixel focusing of the +n orders was achieved. The measured efficiency in the +1 order was in the 5% to 30% range with the phase-shift enhanced efficiency occurring at 8.3 nm where the gold bars are partially transmitting. The +2 and higher order efficiencies were much lower than the +1 order efficiency. The efficiencies were constant when the zone plate was tilted by angles up to +/- 1 degrees from the incident radiation beam. This work indicates the feasibility and benefits of using zone plates to measure the absolute EUV spectral emissions from solar and laboratory sources: relatively high EUV efficiency in the focused +1 order, good out-of-band rejection resulting from the low higher-order efficiencies and the ZP focusing properties, insensitivity to (unfocused) visible light scattered by the ZP, flat response with off-axis angle, and insensitivity to the polarization of the radiation based on the ZP circular symmetry. EUV sensors with Fresnel zone plates potentially have many advantages over existing sensors intended to accurately measure absolute EUV emission levels, such as those implemented on the GOES N-P satellites that use transmission gratings which have off-axis sensitivity variations and poor out-of-band EUV and visible light rejection, and other solar and laboratory sensors using reflection gratings which are subject to response variations caused by surface contamination and oxidation.

Characterization of Relative Diffraction Performance of Soft X-Ray Zone Plates by Experiment

A New Method Of Calculating The Diffraction Efficiency For Diffraction/Refraction Infrared Hybrid System

Characterization of the Pinhole Diffraction Based on the Waveguide Effect in a Point Diffraction Interferometer

Research on Time Characteristics of Soft X-ray Diode

Performance Test of Fresnel Zone Plate with 50 nm Outermost Zone Width in Hard X-ray Region

Comprehensive Design and Calibration of an Even Aspheric Quarter-Wave Plate for Polarization Point Diffraction Interferometry.

Polarization Point Diffraction Interferometry Based on an Even Aspheric Quarter-Wave Plate

Simulation of an X-ray Fresnel Zone Plate with Nonideal Factors

A dielectric Kinoform zone plate with 15 nm resolution and high efficiency for soft X-ray optics

A Compound Kinoform/Fresnel Zone Plate Lens with 15 Nm Resolution and High Efficiency in Soft X-Ray.

A study of structural effects on the focusing and imaging performance of hard X‐rays with 20–30 nm zone plates

Measurement of Zone Plate Efficiencies in the Extreme Ultraviolet and Applications to Radiation Monitors for Absolute Spectral Emission

High-efficiency focusing and imaging by dielectric kinoform zone plate lenses with soft X-rays.

High-efficiency multilevel zone plates for keV X-rays

Off-line Measurement Experiments of Far-Field Intensity Caused by Large-Aperture Continuous Phase Plates

Ray Aberrations Analysis for Phase Plates Illuminated by Off-Axis Collimated Beams.

Design and Analysis of Orthogonal Polarization Point Diffraction Pinhole Plate

Working Conditions On Designing An X-Ray Phase Plate Using Three-Beam Dynamical Diffraction

High Efficiency Multilevel Phase-Type Fractal Zone Plates.

The Fabrication and Application of Zernike Electrostatic Phase Plate.

Demonstrations of the Diffraction and Dispersion Phenomena of Part Fresnel Phase Zone Plates