Micro-assembly auto-focusing system based on image processing

Rui-ling DUAN,Hui-bo DUAN,Qing-xiang LI,Yu-he LI,Zai-hua YANG
DOI: https://doi.org/10.3321/j.issn:1004-924X.2006.03.024
2006-01-01
Abstract:Based on the image processing technology, an auto-focusing system consisted of optical microscope, CCD, moment motor and drive gear etc, was presented. In combination of coarse with fine adjustment method, this system applied Krisch-image edge gradient operator to evaluate the entire microscopic image of the micro-object for its coarse focus position, the system also used the sharpness function based on high frequency component to evaluate the certain domain of the microscopic image for fine adjustment. The sharpness functions used in the experiment were programmed with Visual C++, and the experimental results show that the position accuracy of auto-focusing system is less than ±4.8 μm, which satisfies the focusing requirement of the micro-assembly.
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