Abstract:Micro system currently is the mainstream of application and demand of the field of micro fabrication of civilian and national defense. Compared with the macro assembly, the requirements on location accuracy of the micro-assembly system are much higher. Usually the dimensions of the components of the micro-assembly are mostly between a few microns to several hundred microns. The general assembly precision requires for the sub-micron level. Micro system assembly is the bottleneck of micro fabrication currently. The optical stereo microscope used in the field of micro assembly technology can achieve high-resolution imaging, but the depth of field of the optical imaging system is too small. Thus it's not conducive to the three-dimensional observation process of the micro-assembly. This paper summarizes the development of micro system assembly at home and abroad firstly. Based on the study of the core features of the technology, a program is proposed which uses wave front coding technology to increase the depth of field of the optical imaging system. In the wave front coding technology, by combining traditional optical design with digital image processing creatively, the depth of field can be greatly increased, moreover, all defocus-related aberrations, such as spherical aberration, chromatic aberration, astigmatism, Ptzvel(field) curvature, distortion, and other defocus induced by the error of assembling and temperature change, can be corrected or minimized. In this paper, based on the study of theory, a set of optical microscopy imaging system is designed. This system is designed and optimized by optical design software CODE V and ZEMAX. At last, the imaging results of the traditional optical stereo microscope and the optical stereo microscope applied wave front coding technology are compared. The results show that: the method has a practical operability and the phase plate obtained by optimized has a good effect on improving the imaging quality and increasing the depth of field.

Experiments on Image Processing for Micro-Assembly

Micro-image Definition Evaluation Using Multi-Scale Decomposition and Gradient Absolute Value

Micro-assembly auto-focusing system based on image processing

Design and Optimization for Microscope Autofocus Systems Based on the Analysis of Video Signals

High-Resolution Real-Time Visual Inspection System for Micro Assembly

Automated Micro-Assembly Of Hydrogel Modules Based On Defocus Feature

A Novel Auto-focusing Method Applied to Micro Manipulation System

An image mosaic technique with non-overlapping regions based on microscopic vision in precision assembly

Image Processing Technique for Microstructure Measurement System

Laser Scanning Confocal Image Alignment Assists Sub-micron Accuracy Micro-assembly

Software Design for Image Stitching, Depth of Field Expansion and Auto-Focusing Operation on Intelligent Microscopy System Based on Software-Driven Hardware

Micro-Assembly System for Non-Silicon MEMS Micro Devices Based on Vision Alignment

A Flexible Experimental System For Complex Microassembly Under Microscale Force And Vision-Based Control

Design of an Optical System with Large Depth of Field Using in the Micro-Assembly

Research on Wavelet Based Autofocus Evaluation in Micro-vision

Research on Auto-Focusing Technology for Micro Vision System

A Multi-Sensor System For Optical Precise Assembly

A Microscopic Multi-view Based Workeell for Wafer-level Microassembling

Automatic Illumination of Microscopic Machine Vision Optimization for Precision Miniature Parts Automatic Assembly System

Automatic Micro-manipulation Based on Visual Servoing

Micro-vision auto focus by image analysis