Visual Feedback Autofocusing Method Combining Fine and Rough Adjustment

YANG Zai-hua,LI Yu-he,LI Qing-xiang,GUO Yang-kuan
DOI: https://doi.org/10.3969/j.issn.1000-7024.2005.09.003
2005-01-01
Abstract:Autofocusing isthe keytechnique to ensure capturing clearest image in optical systems.An autofocusing devicewas designed for a micomanipulator.The device is by evaluating the image definition to automatically search the focal plane.To evaluatin the image definition,the Krisch gradient function and high frequency function were combined.Krisch gradient function is used to roughly adjusted and high frequency function is to be fine adjusted in narrow range.The combination of two functions has the merits such as anti-jamming and high efficiency.The maximal deviation of the experiments is 6 um within acceptable limits from a standard.
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