SENSITIVITY ANALYSIS IN MICROWAVE PHOTOCONDUCTANCE DECAY METHOD

Fengxiang Chen,Rongqiang Cui,Lin Xu
DOI: https://doi.org/10.3321/j.issn:0254-0096.2006.01.005
2006-01-01
Abstract:The sensitivity for the semiconductor minority carrier lifetime measurement system was determined using microwave photoconductance decay. The reflection coefficient and the sensitivity were determined using Maxwell equations and the method of a transfer matrix. The dependences of sensitivity on the dark conductivity of sample and the thickness of sample for the general and two special measurement configurations were discussed. The result showed that, putting a metal reflector behind the detected sample with an optimal distance L is helpful to increase the sensitivity compared to the other two cases for all conductvity samples.
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