Single cathode sputtered selective solar absorbing surfaces

Yin Zhiqiang
2005-01-01
Abstract:Aluminum single cathode cylindrical magnetron sputtering technique has been developed for 20 years. Three generations of aluminum single cathode cylindrical magnetron sputtering batch coaters: horizontal solenoid magnetic field, vertically periodic permanent magnetic field and vertically rotating permanent magnetic field were developed manufacturing AlNx/Al-AlNx/Al or AR/ Al-AlNx/Al on the outside of the inner glass tube of all-glass evacuated collector tubes, and heat treated 1 hr at higher than 450? in vacuum during the evacuation processing of collector tubes. Solar absorptance for the heat treated surface has up to 0.95 (AM1.5) and the emittance is around 0.05(80?), the absorbing layer consists of Al and AlNxOy was proved by Auger scanning and XPS microanalysis. The selective surface is suitable for all-glass evacuated collector tubes which use borosilicate glass 3.3 and mainly has diameters of cover and inner glass tube of 47 mm and 37 mm, respectively, and have the lengths of 1.2 m, 1.5 m or 1.8 m with the best cost effective for domestic hot water, green house and industry heat. In 2003, Annual output of solar water heating systems was around 12 million m2, around 85% all-glass evacuated tube collectors of the market share of solar water heating systems in China.
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