Fabrication Of Compound Lattice By Holographic Lithography

Yc Zhong,Sa Zhu,Hz Wang
DOI: https://doi.org/10.1088/0256-307X/22/2/028
2005-01-01
Chinese Physics Letters
Abstract:Some compound lattices in photonic crystals with large complete photonic band gaps, such as the diamond structure and the two-dimensional hexagonal compound structure, is desired for fabrication. A novel method for fabrication of compound lattices by holographic lithography is reported. The key point is phase modulation by photoelectrical control and multiple-exposure techniques. This technique introduces many advances: for instance, using the same coherent beams and without changing the position of the sample during multiple-exposure.
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