A New Type of Liquid Density Sensor Using IDT Technics

ZHU Xia,DENG Ming-xi
DOI: https://doi.org/10.3969/j.issn.1004-2474.2005.06.004
2005-01-01
Abstract:A new type of minim liquid density sensor using a structure consisting of piezoelectric substrate-liquid layer-piezoelectric substrate has been examined in the present work.The two interdigital transducers(IDTs)are deposited at an interface of the structure respectively.The two piezoelectric substrates are parallel to each other and the two IDTs are positioned face to face.Under given conditions,the first IDT deposited at one interface and driven by a tone burst can generate a high frequency Acoustic Bulk Wave(BAW)pulse only into the liquid layer.The BAW pulse generated with the first IDT can reflect back and forth in the liquid layer between the two interfaces of the structure.There is an output of electrical pulse in the second IDT located on the other interface of the structure when the BAW pulse generated with the first IDT impinges on the location of the second IDT each time.The density of the liquid layer between the two piezoelectric substrates can be characterized by the change of transient time of a round trip of the BAW pulse.The density of the liquid layer can be obtained by measuring the change of the interval between the first two electrical pulses from the second IDT.The experimental results show that the minim liquid density sensor consisting of piezoelectric substrate-liquid layer-piezoelectric substrate has at least a measurement sensitivity of 10~(-5)g.cm~(3)/ns.
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