Properties Characterization of Piezoelectric Shear Mode Actuator

Zhang Zhigang,Xie Dan,Liu Zhihong,Zhu Jun
DOI: https://doi.org/10.3321/j.issn:1002-185X.2005.z2.122
2005-01-01
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Abstract:Impedance analysis was used to characterize the properties of Piezoelectric Shear Mode Inkjet Actuators based on the standard equivalent circuit. Theory and experiment demonstrated that the actuators with larger resistance (real part of impedance) at resonance frequency exhibited good mechanical quality factor and coupling coefficient. The effect of polarization states on the actuators properties has been investigated. Actuators with poled parallel the ceramic channel exhibited good performance. However, the actuators were destroyed after depolarizing at high temperature or poled vertical the ceramic channel by applied large voltage on them. As a result, the drive pulse and the bias voltages should be limited below the coercive voltage. Low temperature behavior has been studied from 50 K to room temperature for the actuator properties and mechanism. The resonance frequency increased as decreasing the temperature because of increasing for the stiffness coefficient at low temperature. On the other hand, the intensity of resistance at resonance frequency increased with decreasing temperature, which related to the improvement of mechanical quality factor at low temperature.
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