Virtual moiré fringe for grating measurement system based on CMOS microscopic imaging
Jin Xu,WenTong Ye,Xuxiang Ni,Xiangqun Cao
DOI: https://doi.org/10.1117/12.869628
2010-01-01
Abstract:Moire fringe is a traditional subdivision technique in precision displacement measurement. In general, use photodiode as a four-segment sensor. In this paper, we'll introduce a new system for grating subdivision of moir, fringe. The system consists of light source, condenser lens, grating, microscope tube, and CMOS image sensors. Different ways with the traditional image acquisition, there is an angle theta between grating stripe and the optical axis of the microscope system. Therefore, the stripe image which output by the CMOS image sensor becomes oblique. With different method of our previous study, a virtual moir, will form by the oblique stripes superimposed with the CMOS image array, which using digital image processing. The same as traditional method, the movement direction of the virtual moir, fringe is vertical with the direction movement of grating in this system. The virtual moir, fringe will move a space with grating period, the magnification has a relationship with the angle theta. Compare with early study, the largest increase for this system is the average effect of grating measurement system will be fully utilized by virtual moir, formed by CMOS image array. For the subdivision technique use the CMOS image array, system resolution will be large increased too. In this paper, the details of system components will be introduced, the magnification relationship of grating period and tilt angle will be discussed. It can be concluded that virtual moir, subdivision system performs better resolution and precision from experiment results.