Study of dynamic response on a MOEMS 2×2 optical switch

DongMing Sun,Wei Dong,Wenbin Guo,Caixia Liu,Guodong Wang,Xin Yan,Baokun Xu,Weiyou Chen

DOI: https://doi.org/10.1117/12.570940

2005-01-01

Abstract:The MOEMS 2 x 2 optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Analytical formulae for the squeeze film damping coefficient and the squeeze film damping moment on the cantilever beam of the optical switch are derived. Based on the torsion dynamics theory, the technique and relative results are presented for analyzing the actuating voltage and the switch time. The optimized result of parameters is as: length, width and thickness of the torsion beam are 700, 12 and 10 mu m, length and width of the cantilever beam are 1900 and 1000 mu m, length and width of the balance beam are 100 and 1000 pin, shortest spacing between the upper and lower electrodes is 0.05 mu m, and highness of the lower electrode is 55 mu m, respectively. The actuating voltage is less than 10 V, and the switching time of T-on and T-off are 1.30 ms and 1.25 ms, respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on MOEMS optical switch.