Preparation and Screening of a Magnetooptic Materials Chip Composing Six Elements

蔡英文,顾明,冯兰,张桂林,王松有,李晶,陈良尧
DOI: https://doi.org/10.3321/j.issn:1006-2467.2004.02.035
2004-01-01
Shanghai Jiaotong Daxue Xuebao/Journal of Shanghai Jiaotong University
Abstract:A dichotomous mask scheme was developed, which makes it feasible to obtain 2n chip units through n steps, moreover, these units construct a complete combination of the n elements or compositions adopted during the fabrication. Using combinatorial ion implantation, a magnetooptic materials chip composing Fe,Mn,Ga and Cu was fabricated in ion sputtered CoAg films. The magnetooptic Kerr effect(MOKE) of each unit was systematicly measured under 1T magnetic field. The experimental results show that combinatorial ion implantation enables us to develop novel materials systems of granular magnetooptic films for information storage more rapidly, efficiently and cost-effectively.
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