Measurement of Root-Mean-Square Phase Errors in Arrayed Waveguide Gratings

XP Zheng,YL Chu,W Zhao,H Zhang,YL Guo

DOI: https://doi.org/10.1088/0256-307x/21/2/034

2004-01-01

Abstract:The interference-based method to measure the root-mean-square phase errors in SiO2-based arrayed waveguide gratings (AWGs) is presented. The experimental results show that the rms phase error of the tested AWG is 0.72 rad.

What problem does this paper attempt to address?

Theoretical Investigation on the Influence of Phase Errors in Awg

YL Chu,HY Zhang,XP Zheng,XM Liu,YL Guo

DOI: https://doi.org/10.1109/tencon.2002.1180335

2002-01-01

Abstract:The optical path deviation, also quoted as phase error, is a key element determining the,crosstalk and insertion loss performance in arrayed waveguide gratings (AWG). This paper presents a theoretical analysis on the character of phase errors in AWG. We have developed a statistical model to estimate the influence of phase errors in silica-based AWG by using Fourier optics and scalar diffraction theory. Also, the filter property of AWG caused by phase errors is: analyzed. To maintain the adjacent crosstalk <-- 25dB, there is a standard deviation maximum sigma(max) of phase errors to the design of AWG.
Comparative analysis of mid-spatial frequency errors measurement using multiple phase retrieval algorithms

Lei Zhao,Xiao Huang,Jian Bai,Xiangdong Zhou,Yupeng Luo,Juan Du,Yujie Luo

DOI: https://doi.org/10.1117/12.2502680

2018-01-01

Abstract:In inertial confinement fusion high energy system, the mid-spatial frequency (MSF) errors of optical elements induced by computer numerical control tools lead to damage to the optical system. Based on the characteristics of the mid-spatial frequency errors, it is measured by using phase retrieval technology. Compared with conventional measurement methods such as interferometry, MSF errors can be measured by phase retrieval without complex measurement systems and large aperture optical elements with MSF errors can be measured via phase retrieval in theory. In this paper, we compare multiple phase retrieval algorithms that are used to measure optical element with MSF errors and explore approaches to improve the quality of results. First, we briefly introduce the feature of MSF errors and the relation between the wavefront of optical element with MSF errors and its diffraction pattern. Second, multiple phase retrieval algorithms including error-reduction (ER) algorithm, hybrid input-output (HIO) algorithm and oversampling smoothness (OSS) algorithm are adapted for the measurement of MSF errors. According to the bandwidth and structure characteristics of MSF errors, the convergence speed and the accuracy of above algorithms are discussed and compared. Then, according to the characteristics of different algorithms, different retrieved wavefront phase via using these algorithms are integrated to improve the accuracy of results. Last, based on the feature of MSF errors, the priori knowledge of algorithms is also discussed to further gear up the convergence speed and the accuracy of algorithms.
Silicon-Based Arrayed Waveguide Gratings for WDM and Spectroscopic Analysis Applications

Jun Zou,Fangyuan Sun,Changhui Wang,Ming Zhang,Junnan Wang,Tingting Lang,Xuyang Wang,Zichun Le,Jian-Jun He

DOI: https://doi.org/10.1016/j.optlastec.2021.107656

2022-01-01

Abstract:We compare the performance of silicon-based arrayed waveguide gratings (AWGs) with star couplers of Rowland and Confocal configurations, respectively, for both TE and TM polarizations. The star coupler with Rowland configuration and constant projection period for phased array waveguides on the tangent line at the grating pole shows sufficiently small aberration for all output channels of AWGs, achieving a better spectral performance compared to the Confocal configuration. The spectral performance of AWGs is also highly dependent on phase errors resulting from fabrication imperfections which are unavoidable in current fabrication technology, hence it is of significant importance to make the phase region of AWGs as small as possible. Using the optimized star coupler configuration, ultracompact large channel spacing AWGs employing a single bend with a different radius for each waveguide in the phase array and a S-shaped waveguide array, respectively, are fabricated and compared, together with high resolution (de)multiplexers utilizing the cascade of (N + 1) x (N + 1) AWGs and polarization combiner-rotator/rotator-splitter. High resolution ultracompact spectrometers using bidirectional (N + 1) x (N + 1) AWGs operating at TE and TM polarizations are also designed and fabricated. All the experimental results indicate that a smaller footprint for the phase region of AWGs contributes to an improved performance in their spectral responses. We also discuss the ways to reduce the size of phase region and suggest that decreasing the pitch of adjacent output waveguides on the imaging plane is an effective way. This paper provides design considerations for silicon-based AWGs towards various applications such as wavelength division multiplexing (WDM) and spectroscopic analysis.
Temperature-fluctuation-sensitive accumulative effect of the phase measurement errors in low-coherence interferometry in characterizing arrayed waveguide gratings

Changyun Zhao,Bing Wei,Longzhi Yang,Gencheng Wang,Yuehai Wang,Xiaoqing Jiang,Yubo Li,Jianyi Yang

DOI: https://doi.org/10.1364/AO.54.008036

IF: 1.9

2015-01-01

Applied Optics

Abstract:We investigate the accumulative effect of the phase measurement errors in characterizing optical multipath components by low-coherence interferometry. The accumulative effect is caused by the fluctuation of the environment temperature, which leads to the variation of the refractive index of the device under test. The resulting phase measurement errors accumulate with the increasing of the phase difference between the two interferometer arms. Our experiments were carried out to demonstrate that the accumulative effect is still obvious even though the thermo-optical coefficient of the device under test is quite small. Shortening the measurement time to reduce the fluctuation of the environment temperature can effectively restrain the accumulative effect. The experiments show that when the scanning speed increases to 4.8 mm/s, the slope of the phase measurement errors decreases to 5.52 x 10(-8), which means the accumulative effect can be ignored. (C) 2015 Optical Society of America
Research on Two Optical Methods for Aspheric Measurement

Zhu Yongjian,Yin Shaohui,Sheng Xiaomin,Tang Kun

DOI: https://doi.org/10.3321/j.issn:1004-132x.2009.03.005

2009-01-01

Abstract:To realize the 3D profilometry,a four-step phase shifting method integrated with fringes projection was adopted.In the fringe-projection profilometry,a computer-simulated fringe patterns was projected on the free-form surface of object and the fringes were captured by the phase-shifting technique.Automatic image-processing software with the proposed DCT-based phase-reconstructing algorithm was developed to reconstruct the continuous phase map from fringe patterns.The final 3D profile of object was obtained from the phase map.The corresponding experiments were conducted independently.In interferometry,a new-type interferometer was proposed,which combined the radial shear interferometer with simultaneous phase-shifting technique.It was based on the optical path with two Jamin glass plates and realized the collection of four frames of fringe patterns according to the principle of polarized light.It can test the full-field surface with different sizes and be free from vibration.The theoretical accuracy of this interferometer can reach 1/100 wavelength.Because it enjoys high anti-Jamming performance,the proposed interferometer can realize the high-precision dynamic measurement of aspheric surface under the common conditions without any vibration-isolated setup.
Measurement of Absolute Phase Shift on Reflection of Thin Films Using White-Light Spectral Interferometry

Hui Xue,Weidong Shen,Peifu Gu,Zhenyue Luo,Yueguang Zhang,Xu Liu

DOI: https://doi.org/10.3788/col20090705.0446

2009-01-01

Abstract:A novel method to measure the absolute phase shift oil reflection of thin film is presented utilizing a white-light interferometer in spectral domain. By applying Fourier transformation to the recorded spectral interference signal, we retrieve the spectral phase function phi, which is induced by three parts: the path length difference in air L, the effective thickness of slightly dispersive cube beam splitter T(eff) and the nonlinear phase function due to multi-reflection of the thin film structure. We utilize the fact that the overall optical path difference (OPD) is linearly dependent on the refractive index of the beam splitter to determine both L and T(eff). The spectral phase shift oil reflection of thin film structure can be obtained by subtracting these two parts from phi. We show theoretically and experimentally that our new method can provide a simple and fast solution in calculating the absolute spectral phase function of optical thin films, while still maintaining high accuracy.
Performance limits of astronomical arrayed waveguide gratings on silica platform

Andreas Stoll,Kalaga Madhav,Martin Roth

DOI: https://doi.org/10.1364/OE.410439

2020-12-04

Abstract:We present a numerical and experimental study of the impact of phase errors on the performance of large, high-resolution Arrayed Waveguide Gratings (AWG) for applications in astronomy. We use a scalar diffraction model to study the transmission spectrum of an AWG under random variations of the optical waveguide lengths. We simulate phase error correction by numerically trimming the lengths of the optical waveguides to the nearest integer multiple of the central wavelength. The optical length error distribution of a custom-fabricated silica AWG is measured using frequency-domain interferometry and Monte-Carlo fitting of interferogram intensities. In the end, we give an estimate for the phase-error limited size of a waveguide array manufactured using state-of-the-art technology. We show that post-processing eliminates phase errors as a performance limiting factor for astronomical spectroscopy in the H-band.

Instrumentation and Methods for Astrophysics
Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

WenHua Long,GuangBo Li,Kemiao Jia,Hongchang Qu,Yanzhe Tang,Yaming Wu,Jianyi Yang,Yuelin Wang-

2005-01-01

Abstract:A 1 × 32 silica-on-silicon-based arrayed waveguide grating is designed and fabricated. The detailed consideration of waveguide bending, coupling between adjacent waveguides, and the taper structure for the design of the arrayed waveguide grating is presented. By applying the high-resolution photomask, PECVD-based silica deposition, reactive ion etching, and 8° end-face polishing, a AWG chip is obtained with crosstalk lower than -28 dB for the adjacent channels and -35 dB for the non-adjacent channels. The average insertion loss is about 4.9 dB and the imbalance is approximately 1.72 dB after the chip is fiber-array coupled and packaged.
Exact surface measurement based on phase error insensitive method for white-light scanning interferometer

Changsheng Ji,Songjie Luo,Osami Sasaki,Ziyang Chen,Jixiong Pu

DOI: https://doi.org/10.1088/2051-672x/ad50f0

2024-05-30

Surface Topography Metrology and Properties

Abstract:Phase error induced by the scanning error of piezoelectric transducer and vibration in white-light interference signal (WLIS) impose limitations on measurement accuracy. In this paper, two techniques are investigated to eliminate phase error cooperatively. A monochromatic interferometer owning the same optical path as the white-light scanning interferometer (WLSI) is employed to detect and compensate the phase error. Due to the incomplete consistency between the detected phase error and its actual distribution, an algorithm is introduced to further enhance the measurement accuracy. The simulation is given to prove the proposed method is available in different magnitude of noise. In the experiment, the front surface of wedged window is measured, whose maximum fluctuations are reduced to 28.8 nm and 3.0 nm from 62.7 nm with the gradual application of two technologies, and the repeatability reach 5.0 nm and 0.4 nm from 16.8 nm, respectively. The root mean square height Sq and maximum height Sz ultimately decrease to 1.3 nm and 1.6 nm. The measurement of step with height of about 3.0 m also has the good accuracy and repeatability after phase error elimination. Since the different reflectivity of measured surfaces in the wavelength range of light source will also bring the measurement error, its influences are analyzed by simulation. The proposed techniques provide a phase error insensitive method for WLSI that has potential on measurement in the complex environment.

materials science, multidisciplinary,engineering, mechanical,instruments & instrumentation
On-line Three-Dimensional Inspection Using Randomly Phase-Shifting Fringe Based on Least-Square Iteration

WU Ying-chun,CAO Yi-ping,XIAO Yan-shan

DOI: https://doi.org/10.3788/ope.20142205.1347

2014-01-01

Abstract:An on-line Phase Measuring Profilometry(PMP)based on least-square iteration was proposed to simplify the complexities of system installment and to avoid the influence of additional phase ?shifting caused by the non-parallelism between grating lines and object's displacement in the PMP based on synchronous detection.In measurement processing,the sinusoidal grating with arbitrary grid line direction was projected onto an object,and a CCD was used to capture the deformed fringe patterns.After pixel matching,fringe patterns were used to evaluate the phase distribution.The phase-shifting was determined as arbitrary values by both projection system and object's displacement.Finally,the least-square iteration was used to calculate the phases.The experiment result shows when the grating line directions on the reference plane are changed,the measurement resultsare stable,and the root-mean-square error is less than 0.169 9mm.It concludes that the proposed method relaxes the restriction of the spatial location of measurement equipment,increases the measurement flexibility and makes the PMP more applicable.
Performance improvement for silicon-based arrayed waveguide grating router.

Jun Zou,Zichun Le,Jinhua Hu,Jian-Jun He

DOI: https://doi.org/10.1364/OE.25.009963

IF: 3.8

2017-01-01

Optics Express

Abstract:We analyze the impact of aberration on spectral performance of silicon-based arrayed waveguide grating (AWG) router with the conventional design using a constant pitch along the grating circle for the array waveguides near the free propagation region (FPR), and simulation results show that due to existence of large aberration, side lobes occur in spectral responses of peripheral output channels for the center input light while more serious side lobes appear in most output channels within a free spectral range (FSR) for the edge channel input. Therefore, there is a high crosstalk in conventional N x N silicon AWG, which is very detrimental for router applications. In order to address it, a simple design with a constant projected period on a line tangent to the grating at its pole for the array waveguides near the FPR is proposed, and aberrations of all output wavelengths within a FSR are kept at a rather low level both for the center and edge input. Then we fabricate two kinds of AWG routers with the conventional and proposed design respectively on a SOI wafer, and experimental results show that spectral responses of the AWG router with the proposed design are significantly improved compared to those obtained in the conventional design, especially for the edge channel input. (C) 2017 Optical Society of America
General Measurement of Optical System Aberrations with a Continuously Variable Lateral Shear Ratio by a Randomly Encoded Hybrid Grating

Tong Ling,Yongying Yang,Dong Liu,Xiumei Yue,Jiabin Jiang,Jian Bai,Yibing Shen

DOI: https://doi.org/10.1364/ao.54.008913

IF: 1.9

2015-01-01

Applied Optics

Abstract:A general lateral shearing interferometry method to measure the wavefront aberrations with a continuously variable shear ratio by the randomly encoded hybrid grating (REHG) is proposed. The REHG consists of a randomly encoded binary amplitude grating and a phase chessboard. Its Fraunhofer diffractions contain only four orders which are the ±1 orders in two orthogonal directions due to the combined modulation of the amplitude and phase. As a result, no orders selection mask is needed for the REHG and the shear ratio is continuously variable, which is beneficial to the variation of sensitivity and testing range for different requirements. To determine the fabrication tolerance of this hybrid grating, the analysis of the effects of different errors on the diffraction intensity distributions is carried out. Experiments have shown that the testing method can achieve a continuously variable shear ratio with the same REHG, and the comparison with a ZYGO GPI interferometer exhibits that the aberration testing method by the REHG is highly precise and also has a good repeatability. This testing method by the REHG is available for general use in testing the aberrations of different optical systems in situ.
A New Method Using Orthogonal Two-Frequency Grating in Online 3d Measurement

Kuang Peng,Yiping Cao,Yingchun Wu,Mingteng Lu

DOI: https://doi.org/10.1016/j.optlastec.2016.03.018

2016-01-01

Abstract:In online 3D measurement, a new method using orthogonal two-frequency grating based on Phase Measuring Profilometry(PMP) is proposed. The modulation of the entire measured object is used to match pixels and this proposed method successfully resolves the contradiction of the demand for different frequency fringes between the extraction of the modulation information and the phase unwrapping. The high-frequency fringe is used to catch the better modulation patterns for pixel matching, and the low-frequency fringe is used to calculate the phase distribution and avoid phase unwrapping error. In addition, to extract the better modulation patterns for pixel matching, the flat filtering window replaces the circular filtering window to avoid the spectrum aliasing phenomenon. The simulations and experiments show its feasibility.
Design and Fabrication of 8×8 Silica-Based Arrayed Waveguide Grating

LI Guang-bo,LONG Wen-hua,JIA Ke-miao,TANG Yan-zhe,WU Ya-ming,YANG Jian-yi,WANG Yue-lin

2006-01-01

Abstract:An 8×8 silica-based arrayed waveguide grating(AWG) with the central wavelength of 1.55 μm and the channel spacing of 0.8 nm is designed and fabricated.The design,fabrication and test process are presented in details.According to the test results of the packaged chip,the 3 dB bandwidth of the device is 0.22 nm,the minimum and maximum channel loss are 4.01 dB and 6.32 dB,respectively,when the central input channel is used,while the corresponding values for the outermost input channel are 6.24 dB and 9.02 dB,respectively.The output wavelength shift is below 0.039 nm.The crosstalk of the device is better than -25 dB.And the PDL of the device is less than 0.3 dB.
Birefringence compensated arrayed waveguide grating

jun zou,xiang xia,tingting lang,jianjun he

DOI: https://doi.org/10.1117/12.2071941

2014-01-01

Abstract:In this paper we review our work on birefringence compensated arrayed waveguide grating. We elaborate on a birefringence compensation technique based on angled star couplers in arrayed waveguide grating (AWG) and discuss several demonstrations both in low-index-contrast and high-index-contrast material systems. A 16-channel AWG with 100GHz channel spacing for DWDM application is designed and fabricated in silica-based low-index-contrast waveguide. The experimental results confirm that the polarization-dependent wavelength shift (PD lambda) can be tuned by varying the incident/diffraction angle at the star couplers and a birefringence-free property can be achieved without additional fabrication process as compared to conventional AWG. A further validation of this technique is demonstrated in high-index-contrast silicon-on-insulator waveguide, in combination with different diffraction orders for TE and TM polarizations. A birefringence compensated silicon nanowire AWG for CWDM optical interconnects is designed and fabricated. The theoretical and experimental results show that the PD lambda can be reduced from 380-420nm to 0.5-3.5 nm, below 25% of the 3 dB bandwidth of the channel response in the wavelength range of 1500 to 1600nm.
Ultracompact Silicon-On-Insulator-Based Reflective Arrayed Waveguide Gratings for Spectroscopic Applications

Jun Zou,Tingting Lang,Zichun Le,Jian-Jun He

DOI: https://doi.org/10.1364/ao.55.003531

IF: 1.9

2016-01-01

Applied Optics

Abstract:Ultracompact reflective arrayed waveguide gratings (RAWGs) employing a half horseshoe-shaped waveguide layout and distributed Bragg reflector mirrors in the array region are designed and fabricated. Two sets of RAWGs with 400 and 200 GHz channel spacing are experimentally demonstrated for TE and TM polarizations, respectively. Because of the high-index contrast between the silicon core and the oxide cladding, these RAWGs have very compact sizes. With the off-centered light input, we obtained the minimal on-chip losses of 7 and 9 dB and cross talks of <-8 and <-5 dB for 9×400 GHz and 20×200 GHz RAWGs, respectively, for TE polarization. The measured minimal on-chip losses are 10 and 12.5 dB, and cross talks are <-11 and <-7 dB for 8×400 GHz and 10×200 GHz RAWGs, respectively, for TM polarization. These RAWGs can find applications for on-chip spectroscopic sensing.
Experimental Demonstration of Birefringence Compensation Using Angled Star Couplers in Silica-Based Arrayed Waveguide Grating

Xiang Xia,Jun Zou,Tingting Lang,Jian-Jun He

DOI: https://doi.org/10.1109/jphot.2012.2229974

IF: 2.4

2012-01-01

IEEE Photonics Journal

Abstract:A birefringence compensation technique based on angled star couplers in arrayed waveguide grating (AWG) is experimentally investigated in silica-on-silicon waveguide with B-Ge codoped upper cladding. A 16-channel AWG with 100-GHz channel spacing is designed and fabricated. The star couplers are designed according to Rowland circle construction with an oblique incident/diffraction angle. Five different polarization compensation parameters corresponding to different incident/diffraction angles are employed to investigate the stress-induced birefringence. The experimental results confirm that the polarization-dependent wavelength shift (PDλ) can be tuned by varying the incident/diffraction angle at the star couplers, and a birefringence-free AWG can be achieved without any additional fabrication process.
Silica-Based Arrayed Waveguide Grating With Flattened Spectral Response Using A Multimode Interference Coupler

Yz Tang,Km Jia,By Li,Jy Yang,Xq Jiang,Ym Wu,Yl Wang

DOI: https://doi.org/10.1088/0256-307X/21/6/024

2004-01-01

Chinese Physics Letters

Abstract:We designed and fabricated an arrayed waveguide grating based on silica-on-silicon materials with flattened spectral response by adding a multimode interference coupler in the input region. The theoretical analysis and calculation are given. The device has worked effectively and has been tested with the passband 0.43 nm at 1 dB, 0.72 nm at 3 dB and 1.56 nm at 20 dB respectively, at a cost of power penalty of about 1.5 dB. The crosstalk is less than -30 dB, owing to the high-resolution photomask and well-controlled fabrication processes.
Air Flow Turbulence Orthogonality and Surface Error Estimation in Large Aperture Optical Testing

Haixiang Hu,Mingzhuo Li,Xuejun Zhang,Xiao Luo,Erhui Qi,Zhenyu Liu

DOI: https://doi.org/10.1117/12.2617735

2022-01-01

Abstract:As the large-scale SiC materials, CCOS and MRF processing technology is gradually developing, optical manufacturing quickly entered the "era of giant mirror". As every basis of all optical processing, surface testing technology is facing enormous challenges with high efficiency and high precision and high accuracy. As an essential method in large aperture optical testing, we proposed a worthy attempt to estimate the actual surface error map RMS from individual measurement results. In order to overcome some actual working condition limits, it is a supplement to the state-of-the-art large sample averaging methods. This part of work is based on the orthogonality hypothesis, and proposed the real surface error estimation methods using interact scalar product. The experiment of a ∅3m aspherical mirror measurement and analysis indicates that the actual surface error RMS is 0.020~0.023λ, with estimation accuracy ±λ/700.
Dynamic Phase Measurement based on Two-step Phase-shifting Interferometry with Geometric Phase Grating

Yijun Du,Junxiang Li,Chen Fan,Zixin Zhao,Hong Zhao

DOI: https://doi.org/10.1088/1361-6501/ad7b65

IF: 2.398

2024-09-21

Measurement Science and Technology

Abstract:This paper proposes a novel dynamic 2-step phase-shifting interferometry method with a geometric phase grating and direct aberration-free object phase recovery algorithm. By exploring the amplitude-phase modulation property of the geometric phase grating, two-step phase-shifting interferograms with phase shift can be obtained in a single shot through two kinds of spatial-multiplexing arrangements. Then the desired object phase without being disturbed by the system aberration phase would be formed based on the presented 2-step phase-shifting phase demodulation process. Accordingly, a detailed analysis of the theoretical model of error sources is conducted by taking the depolarization error of geometric phase grating and phase measurement model error into consideration, with a Least Squares Iteration optimization strategy established to further improve the measurement accuracy. Experiments on various types of phase objects, such as a photo-etched quartz substrate, the spatial light modulator, and a silicon chip, validate the effectiveness and accuracy of our method when compared with the reference phase obtained from 4-step temporal phase-shifting method. The dynamic phase measurement capability is demonstrated by exhibiting the evaporation process of alcohol droplet.

engineering, multidisciplinary,instruments & instrumentation

Measurement of Root-Mean-Square Phase Errors in Arrayed Waveguide Gratings

Theoretical Investigation on the Influence of Phase Errors in Awg

Comparative analysis of mid-spatial frequency errors measurement using multiple phase retrieval algorithms

Silicon-Based Arrayed Waveguide Gratings for WDM and Spectroscopic Analysis Applications

Temperature-fluctuation-sensitive accumulative effect of the phase measurement errors in low-coherence interferometry in characterizing arrayed waveguide gratings

Research on Two Optical Methods for Aspheric Measurement

Measurement of Absolute Phase Shift on Reflection of Thin Films Using White-Light Spectral Interferometry

Performance limits of astronomical arrayed waveguide gratings on silica platform

Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

Exact surface measurement based on phase error insensitive method for white-light scanning interferometer

On-line Three-Dimensional Inspection Using Randomly Phase-Shifting Fringe Based on Least-Square Iteration

Performance improvement for silicon-based arrayed waveguide grating router.

General Measurement of Optical System Aberrations with a Continuously Variable Lateral Shear Ratio by a Randomly Encoded Hybrid Grating

A New Method Using Orthogonal Two-Frequency Grating in Online 3d Measurement

Design and Fabrication of 8×8 Silica-Based Arrayed Waveguide Grating

Birefringence compensated arrayed waveguide grating

Ultracompact Silicon-On-Insulator-Based Reflective Arrayed Waveguide Gratings for Spectroscopic Applications

Experimental Demonstration of Birefringence Compensation Using Angled Star Couplers in Silica-Based Arrayed Waveguide Grating

Silica-Based Arrayed Waveguide Grating With Flattened Spectral Response Using A Multimode Interference Coupler

Air Flow Turbulence Orthogonality and Surface Error Estimation in Large Aperture Optical Testing

Dynamic Phase Measurement based on Two-step Phase-shifting Interferometry with Geometric Phase Grating