Abstract:Copper (Cu) is an important interconnect metal material in the semiconductor field. While removing excess copper in the chemical mechanical polishing process, it is necessary to add corrosion inhibitors to the slurry to protect copper from excessive corrosion. Numerous studies have shown that the heteroatoms and functional groups of corrosion inhibitors are crucial factors affecting their corrosion inhibition ability. The corrosion inhibition performance of benzimidazole (BI) and its two derivatives, 5-methyl benzimidazole (MBI) and 5-methyl benzotriazole (MBTA), on copper in glycine + N-methylglycine solution at pH 9 was studied, and their structure-activity relationship was revealed. Electrochemical measurements and adsorption isotherm fittings show that the three corrosion inhibitors cover the copper surface mainly through the chemisorption to prevent the anodic reaction of copper. The corrosion inhibition efficiencies of BI, MBI, and MBTA were 97.22%, 98.00% and 98.73% at the concentration of 8 mM, respectively, reaching their maximum values. The contact angle testing reveals that MBI and MBTA containing methyl groups are relatively more hydrophobic. X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) and scanning electron microscope (SEM) results confirm that the three corrosion inhibitors were successfully adsorbed on the copper surface and formed a dense passivation film to protect the copper from corrosive solutions. In addition, a multi-module collaboration with density functional theory (DFT) and molecular dynamics (MD), further demonstrates that BI, MBI, and MBTA are all adsorbed on the copper layer in a mixed way, and MBTA has the strongest binding capacity to copper. The introduction of the methyl and N atom increased the adsorption area and attachment sites between the corrosion inhibitor and copper, which coincides with the experimental results.

Research on Inhibition Effect of Inhibitors on Copper in 55% LiBr Solution

Theoretical and electrochemical analysis on inhibition effects of benzotriazole derivatives (un- and methyl) on copper surface

Corrosion inhibition effect of benzimidazole and two derivatives on copper in alkaline environments: experimental and theoretical analyses

Effect of Corrosion Inhibitor in the Chemical Mechanical Polishing of Copper

Inhibition Mechanism of Benzotriazole in Copper Chemical Mechanical Planarization

Influence of Ph, Immersion Time, and Benzotriazole Concentration on Copper Corrosion in Citric Acid Based Slurries

Investigation of Inhibition of 2-Mercaptobenzoxazole for Copper Corrosion

Experimental and Computational Insights into the Effects of -NH2 and -Cl Functional Groups on the Copper Corrosion Inhibition by Benzotriazole

Synergistic inhibition of azoles compounds on chloride-induced atmospheric corrosion of copper: Experimental and theoretical characterization

Insight into the anti-corrosion mechanism of 2-aminobenzenethiol as the inhibitor for copper in acid environment

Adsorption Mechanism of Benzotriazole on Copper Surface in CMP Based Slurries Containing Peroxide and Glycine

Adsorption behavior and corrosion inhibition performance of tetrazolium derivatives on electrolytic copper foil surface

SYNERGISTIC EFFECT OF CORROSION INHIBITION ON BRONZE BY BENZOTRIAZOLE AND SODIUM MOLYBDATE

Investigation on the Mechanisms of Corrosion Inhibitor 5-aminotetrazole Used in the Copper Chemical Mechanical Polishing

Exploring the effectiveness of two triazole derivatives as copper corrosion inhibitors in NaCl solution: A combined approach of quantitative chemistry and dynamic molecular simulations

First-principles and experimental study on the inhibition efficiency of BTA for 20SiMn steel in chloride-containing solutions

Insights into the Inhibition Mechanism of Three 5-Phenyltetrazole Derivatives for Copper Corrosion in Sulfuric Acid Medium Via Experimental and DFT Methods

Experimental and theoretical study of 2-mercaptopyridine as an effective eco-friendly inhibitor for copper in aqueous NaCl

Corrosion Inhibition of LaFe11.6Si1.4 Alloy by BTA/Sodium Benzoate

Enhancing the corrosion inhibition of copper sheets in oil-in-water (O/W) emulsions by combining two organic heterocyclic derivatives

Adsorption of 2-Mercaptobenzothiazole Organic Inhibitor and its Effects on Copper Anodic Oxidation in Alkaline Environment