Application Of Double-Te Mosfet Mixer In Digital Pressure Sensor

Zh Zhang,Rf Yue,Lt Liu

DOI: https://doi.org/10.1109/icsict.2004.1435182

2004-01-01

Abstract:A digital pressure sensor using double-gate MOSFET mixer is presented. The sensitive unit of this pressure sensor is MOS ring oscillators. The syntonic frequency of ring oscillators will change according to the stress caused by pressure due to the piezoresistive effect of MOSFET. Double-gate MOSFET mixer is used as interior signal processor in order to improve characteristics of the output signal. The pressure sensor has many perfect characteristics such as high sensitivity, low temperature coefficient and simple fabrication process. The device was fabricated by standard IC process mixed with MEMS process. The sensitivity of fabricated devices is 1.52 kHz/kPa. The temperature shift of zero output is -0.5% FS.