Preparation of φ3-inch large-area double-sided YBCO thin film on CeO2 buffered r-plane sapphire

Jie Xiong,Be W. Tao,TingMing Xie,Jiajun Chen,Xingzhao Liu,Ying Zhang,Yanrong Li
2004-01-01
Abstract:We report the deposition of double-sided CeO2 and YBCO epitaxial thin films on sapphire. With a four targets sputtering system, CeO2 and YBCO thin films were in-situ deposited in one run. With a modulated biaxial substrate rotation, homogeneous 3 inch thin films had been obtained. The CeO2 and YBCO films are (001) oriented. FWHMs of CeO2 (002) and YBCO (005) were less than 1°. The typical properties of YBCO thin films are as following: Tc ranging from 88.5 K to 90 K, ΔTc less than 1 K; Jc(77K) being more than 1×106 A/cm2, RS (10 GHz, 77 K) being 0.53 mΩ and 0.56 mΩ for both sides, respectively. The thickness deviation of the YBCO thin films was less than ±5%, which well meets the microwave device application.
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