Effect of Irradiation on Ti-Doped Sapphire by Excimer Laser

蒋成勇,周国清,徐军,邓佩珍,干福熹
DOI: https://doi.org/10.3321/j.issn:0258-7025.2004.06.008
2004-01-01
Abstract:Ti-doped sapphire crystals were irradiated by the argon fluoride (ArF) excimer laser. Comparing the spectra before and after irradiation, the increasing of absorption spectrum peak at 218 nm is much larger than that at 193 nm and 266 nm. Fluorescence spectra of different figure of merit (FOM) samples at 420 nm were measured, and the results indicate that fluorescence intensity decreases with the increase of the FOM. The fluorescence intensity of samples at 420 nm decreases after the excimer laser irradiation. In the EPR spectrum of the Ti-doped sapphire, the intensity of the Ti3+ signal increases after the irradiation. All results indicate that Ti4+ ions change to Ti3+ ions during the irradiation of the excimer laser.
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