Super-Hydrophilic TiO2/SiO2 Composite Thin Films Prepared by RF Magnetron Co-Sputtering

沈杰,沃松涛,蔡臻炜,崔晓莉,杨锡良,章壮健
DOI: https://doi.org/10.3969/j.issn.1672-7126.2004.06.005
2004-01-01
Abstract:SiO2/TiO2 composite thin films were prepared by RF magnetron co-sputtering. The ratio of SiO2 to TiO2 can be adjusted by controlling the sputtering time, respectively. All SiO2/TiO2 composite thin films have anatase phase. We found that addition of SiO2 reduces the photocatalytic activity of SiO2/TiO2 composite thin films and improves its maintaining time of super-hydrophilicity. The contact angle of the films with SiO2 ratio of 6%-13% decreases to 2° during a 30 min UV irradiation, and keeps lower than 6° for 5 days without UV irradiation.
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