Dynamics Analysis of Micro-Cantilever in Ambient Condition

ZHANG Xin
DOI: https://doi.org/10.3969/j.issn.1006-7043.2004.02.028
2004-01-01
Abstract:Using the method of macro simulating micro, dynamics of a micro-cantilever in the ambient condition was analyzed. First, the micro-cantilever's vibrating-phase was plotted and then its dynamics model was established. The phase of the micro-cantilever's contact on the basis surface was studied by JKR theory. A conclusion was drawn that the dynamics analysis of the cantilever should be focused on the phase having liquid-bridge force. Neck-shrink of the surface materials was also found during the vibration. Finally, an example was given.
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