The Study of Surface Cr Coating Deposited by PVD on Ni-alloy Particles

范洪远,李伟,沈保罗,向文欣,应诗浩
DOI: https://doi.org/10.3321/j.issn:1001-3784.2003.01.003
2003-01-01
Abstract:The authors studied the way to coat Cr films with the thickness of 10 μm on the Ni-alloys particles (75-150 μm) by using the D.C magnetron sputtering technology. The effect of processing parameters on the properties of the coatings was discussed. The results show that coating is pure chromium while the original vacuum is less than 10-2 Pa. In the coating structure there are porous column cone-shaped grains with vaulted top if the vacuum is higher than 0.5-0.1 Pa when sputtering. The way of particle movement in the deposition space affects the uniformity and the integrity of the particle surface coatings. It is pointed out that the technology is suitable for the formation of uniform thick Cr films (≥10 μm) on the particles, and pretreatment and subsequent treatment of the particles are important for the adhesion of the coatings to the particles. The chemical composition of the Ni-alloy used in the test is Ni-Fe-Cr.
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