A Quantitative Circuit Model of the Stator of Piezoelectric Ultrasonic Motor
Xiang Cheng Chu,Ren Bo Yan,Li Yan,Long Tu Li
DOI: https://doi.org/10.4028/www.scientific.net/KEM.224-226.135
2002-01-01
Key Engineering Materials
Abstract:This paper proposes a novel method to establish quantitative equivalent circuit model of rectangle-shaped or ring-shaped ultrasonic motor using a simplified half-wavelength vibrator. The vibrator emerges from the vibration mode shape of the stator and has similar vibration characteristics. The model shows mechanism of ultrasonic motor and reflects an influence of non-symmetric vibration mode, tooth outline, anisotropy of PZT, etc. Using Hamilton principle various electric parameters corresponding to different vibration modes, such as static capacitance, dynamic capacitance, dynamic inductance, dynamic resistance, equivalent input impedance, etc., can be solved. Experiments show good agreement with theoretical results. The approach can also be applied to other piezoelectric motor prototypes, such as traveling wave ultrasonic motors, standing wave ultrasonic motors, etc.