Abstract:Aiming to address the challenging problem of high-precision axicon profile measurement, a laser differential confocal axicon profile normal tracking (LDCNT) measurement method with high spatial resolution and anti-tilt capability is proposed in this paper. This method utilizes the principle of normal direction adaptive tracking for axicon profile measurements. It employs the Phase-Sensitive Detector (PSD) image plane spot position to calculate the normal angle and a high-precision rotary axis to drive the sensor normal to the measured surface to achieve the normal direction adaptive tracking measurement of the axicon profile and reduce the difficulty of pose adjustment of the measured axicon. Using the laser differential confocal focusing principle, the differential confocal signal is normalized to improve the axial resolution and avoid the Abbe error generated by the local inclination of the surface, thus realizing high-resolution and anti-tilt measurement of the axicon profile. Through the reference frame error decoupling axicon profile measurement and evaluation technique, spatial error compensation, three-dimensional profile reconstruction, and evaluation of the measurement data are performed to reduce the systematic measurement error and realize high-precision measurement and reconstruction of the axicon profile. Finally, the feasibility of the method is verified by measuring the profile of a standard cylinder and axicon at different axicon angles. The experimental analyses show that this method provides a new method for high-precision measurement of the axicon profile with Peak-to-Valley (PV) repeatability better than 40 nm (3σ) and Root-Mean-Square (RMS) repeatability better than 15 nm (3σ).

Study of the Tolerance of the Non-Diffracting Beam to Laser Beam Deflection

An Axial Displacement Measurement Relying on the Double-Helix Light Beam

Laser Collimation Method Based on Differential Compensating Beam Drift

Method for Active Spatial Alignment and Stabilization of Laser Beams in Multi-Beam Systems

Axial Nanodisplacement Measurement Based on Astigmatism Effect of Crossed Cylindrical Lenses.

Influence of Transmission Characteristics of Beam Deflector on Orienting Accuracy

Spherical Aberration Compensation Method for Long Focal-Length Measurement Based on Talbot Interferometry

Influence of the Incident Wave-Front on Intensity Distribution of the Nondiffracting Beam Used in Large-Scale Measurement

Propagation of Gaussian Beam Through an Axicon and Its Propagation Properties

Long Focal-Length Measurement Using Divergent Beam and Two Gratings of Different Periods.

Analysis Method of Beam Pointing Stability Based on Optical Transmission Matrix

Characteristics of beam profile of Gaussian beam passing through an axicon

Analysis Of Nonlinear Self-Focusing Phenomenon In High-Power Laser System Based On Ray-Tracing

Extended Projection Distance and Sidelobe Suppression of THz Bessel Beam With Combined Axicons

Laser differential confocal axicon surface profile measurement method

Axial Intensity Optimization Of Converged Laser Beam

Straightness/coaxiality measurement system with transverse Zeeman dual-frequency laser

Adaptive straightness measurement system with dual-frequency laser

Coaxiality measurement method based on revising aberration

A Novel Method for Measuring, Collimating and Maintaining the Spatial Pose of Terminal Beam in Laser Processing System Based on 3D and 2D Hybrid Vision

Non-imaging Method for Angle Measurement Based on an Axicon.