Abstract:The mechanical properties of MEMS materials have much influence on the performance, reliability and service life of MEMS, which may not be characterized by those of large volume materials owing to the small sizes of MEMS components and can be measured by using such measuring methods as nanoindentation, cantilever beams and bulge test. Among them, nanoindentation is the most widely used one since most of the properties can be measured by it and there is not much special request for the sizes and forms of samples. Through thorough analysis of the principle of nanoindentation and several evaluation models of hardness and elastic modulus, the main influence factors on the measuring uncertainties were classified, which may lead to the confusion of the application of the properties in the design of MEMS. Based on the classification of the influence factors, a framework of the standardization related to measuring instruments, samples, indenters, measuring conditions and evaluation models was plotted. For the measuring instruments, the standardization mainly consists of two parts, that is, the measuring system of displacement and load and the indenters, so the uncertainties of signal sensing and data sampling should be specified, and such standardized parameters as geometric sizes and tolerances, formal tolerances, materials and installation of different kinds of indenters were proposed. For the measuring conditions and samples, the main task of standardization is that a series of measuring parameters such as temperature, loading and unloading speeds, holding time at maximum load, maximum load or depth, minimum distance between neighboring indented points and so on should be normalized, and the sizes, surface roughness and structure forms of samples should also be classified according to R 10 series of preferred numbers or other rules. The standardization of evaluation models is a very complicated and difficult problem, so it was suggested that the initially standardized series of evaluation models be established based on several most widely used models, and through a lot of series experiments under the international cooperation among researchers on MEMS products, MEMS materials and nanoindenters, the series of evaluation models for different kinds of indenters and structures of samples may be standardized.

Classification and Evaluation of Influence Factors for Measuring Uncertainty of Property of Micromechanics of Materials by Nanoindentation

Recent Study on the Related Problems in Evaluation of Mechanical Properties for Mems Materials

Influence of Friction in Material Characterization in Microindentation Measurement.

INVESTIGATION ON SEVERAL CRUCIAL FACTORS INFLUENCING THE MEASUREMENT OF MECHANICAL PROPERTIES OF THIN FILMS BY NANOINDENTATION TECHNIQUE

Application of Nanoindentation Tests in the Research of Nanomaterials

Factors Influencing Nanoindentation Test Data

MECHANICAL CHARACTERIZATION OF NEW MES/NEMS MATERIALS USING NANOINDENTATION TECHNIQUE

Influence of Friction on Imperfect Conical Indentation for Elastoplastic Material

Uncertainty Estimation in Measurement of Micromechanical Properties Using Random-Fuzzy Variables

Critical Review of Nanoindentation-Based Numerical Methods for Evaluating Elastoplastic Material Properties

SOME IDEAS OF STANDARDIZATION OF MEASUREMENT AND EVALUATION OF MEMS MATERIALS' MECHANICAL PROPERTIES USING NANOINDENTATION

STUDY ON THE NANOINDENTATION VIA ATOMIC FORCE MICROSCOPE AND MOLECULAR DYNAMICS SIMULATION

Novel Technique for Measuring the Mechanical Properties of Porous Materials by Nanoindentation

Influence of Residual Stresses on the Interfacial Toughness Measurement by Cross-Sectional Nanoindentation

Numerical and Experimental Study of the Roughness Effects on Mechanical Properties of AISI316L by Nanoindentation

Nanohardness by Nanoindentation

Investigation on methods for dealing with pile-up errors in evaluating the mechanical properties of thin metal films at sub-micron scale on hard substrates by nanoindentation technique

Analysis of the Nanoindentation Data Measured with a Berkovich Indenter for Brittle Materials: Effect of the Residual Contact Stress

Mechanical Properties Characterization of Two-Dimensional Materials Via Nanoindentation Experiments

Influence of Sample Surface Condition on Nano Indentation Experiment

Modeling Effect of Surface Roughness on Nanoindentation Tests