Stability investigation of ferroelectric SrBi2Ta2O9 thin films annealed in forming gas

Tao Yu,Dongsheng Wang,Di Wu.,Aidong Li,aiping hu,Zhiguo Liu,Naiben Ming
2002-01-01
Acta Metallurgica Sinica (English Letters)
Abstract:The hysteresis loop changes of ferroelectric SrBi2Ta2O9 (SBT) thin films (330 nm) vs the temperature of forming gas (5% hydrogen+95% nitrogen) annealing were measured when the annealing time was 1 min and 10 min. The selected annealing temperature was at 100°C, 200°C, 250°C, 300°C, 350°C, 400°C and 450°C, respectively. Our results showed that the ferroelectric properties were easily destroyed and the leakage current changed abruptly when the SBT thin films were in their ferroelectric phase (<270°C). The space charges at the grain boundary may take an important role in absorption polarity molecular hydrogen when the SBT thin films were in the ferroelectric phase. The oxygen recovery experiments were also performed and investigated in this work.
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