Soft X-ray holographic microscopy with sub-micrometer resolution

Shiping Jiang,Yuxuan Zhang,Hui Gao,Xinyi Zhang,Min Chen,Jie Chen,ZiZhong Xu
2001-01-01
Abstract:Gabor X-ray in-line holograms are recorded with a photoresist at Hefei National Synchrotron Radiation Laboratory. An atomic force microscope (AFM) is used to read the X-ray holograms of minute granules recorded on photoresist PMMA. Digitized hologram is reconstructed by numerical method. The granules with a size less than 0.3 μm can be resolved in the reconstructed image. So the estimated resolution reaches the level of submicrometer through using existing experimental conditions rather than using undulators.
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