Abstract:Using plasma-enhanced chemical vapor deposition (PECVD), a series of diamond-like carbon (DLC) films were prepared on YG8 carbide substrate by changing the enhancement mode and the negative bias voltage of the substrate. The structure and properties of the deposited films were tested by a series of analytical and testing instruments. During the deposition of DLC films, the ability of electrons to collide and ionize the gas is enhanced by increasing the number of electrons and extending the movement path of electrons, which is called electron-assisted enhanced gas ionization. Four different experimental modes (A mode, B mode, C mode, D mode) were set up. Different experimental modes have different degrees of electron-assisted enhancement ability of gas ionization, so different experimental modes are called different enhancement modes. The ions ionized by the electrons participate in the deposition of the film under the traction of the negative bias voltage of the substrate. The results show that: when depositing diamond-like carbon films, the energy of the ion beam is indirectly affected by electron collisions in different enhancement modes and directly affected by the negative bias voltage of the substrate. The higher the enhancement mode, the higher the ion beam energy. The higher the substrate negative bias voltage, the higher the ion beam energy generated by gas source discharge. Under the dual action of enhancement mode and substrate negative bias voltage, the total energy of ions involved in deposition should not be too high or too low, and the synergy of the two makes the properties and quality of the deposited film reach a better value. For industrial large-scale production of tool protection film for cutting aluminum alloy, it is more suitable for high enhancement mode and low negative bias voltage production. Through a series of process optimization to improve and enhance the comprehensive performance of DLC film, it is further applied to the actual processing application field, which has great industrial and social value to realize the large-scale application of DLC film in the field of hard to cut metal processing.

The Structural and Property Changes of DLC Films after Irradiation with Gamma Ray

Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

Degradation behavior of DLC thin film under gamma-rays irradiation using molecular dynamics simulation

Structure and Optical Characteristics of DLC Films

Field Emission Properties of Diamondlike Carbon Films Deposited by Ion Beam Assisted Deposition

Influence of Ne+ Bombarding Energy on the Properties of Diamond-Like Carbon Film by Ion Beam Assisted Deposition

Primary irradiation damages and tribological property evolutions of heavy-ion radiated microcrystalline diamond films grown by MPCVD

Studies of chemical bonds loss and optical modifications of CR-39 caused by gamma rays

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Structural Characterization And Properties Enhancement Of Diamond-Like Carbon-Films Synthesized Under Low-Energy Ne+ Bombardment

Investigation into the Characteristics of A-C:H Films Irradiated by Electron Beam

Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition

Effect of Ion Bombardment Energy on the Properties of Diamond-like Carbon Film

Radiation Damage Effects on Optical, Electrical, and Thermophysical Properties of CVD Diamond Films

Studies of diamond-like carbon films coated on PMMA by ion beam assisted deposition

Effects of Electron Irradiation on the Dielectric Behavior of Langmuir-Blodgett Terpolymer Films

Nonuniform Transitions of Heavy-Ion Irradiated A-C:H Films: Structure and Antiwear Property Degradation Analysis

Mechanical and tribological properties of non-hydrogenated DLC films synthesized by IBAD

Investigation into the Characteristics of A-C: H Films Radiated by an Electron Beam

Effects of deposited particle energy on the structure and properties of diamond-like carbon films

Effects of γ irradiation on the structure, physical and mechanical properties of a series of tetrafunctional epoxies modified DGEBA/DDS