Abstract:A novel kind of absolute capacitive grating displacement measuring system with both 13 high-accuracy and long-range was proposed, which includes a MOVER and a STATOR. Both the 14 contact surfaces of MOVER and STATOR are coated by a thin layer of dielectric film with low 15 friction coefficient and high hardness. The measuring system works in a contact mode to minimize 16 gap change. This paper presents theoretical analysis for the influence of some factors, including 17 fabrication errors, installation errors and environment disturbance, on measurement signals. 18 Measuring signal model is modified according to the analysis. Signal processing methods are 19 investigated to improve signal sensitivity and signal-noise-ratio (SNR). Displacement calculation 20 model shows that dead-zone problem is solved by orthogonal signals’ design. Absolute 21 displacement is obtained by a simple method using two coarse signals and high accuracy 22 displacement is further determined using two fine signals with the help of absolute information. 23 According to displacement calculation model and error analysis, model accuracy is mainly 24 determined by the error of fine calculation functions and locally affected by coarse calculation 25 functions. It also can be drawn that amplitude difference, non-orthogonality and signal offset are 26 not related to displacement accuracy. Experiments are carried out to confirm the theoretical analysis 27 mentioned above. As demonstrative examples, experiment results show that the displacement 28 resolution and accuracy respectively reach ±4.8 nm and ±34 nm in the displacement range of 5 mm. 29 Both experiments and theoretical analyses indicate that measuring system have great potential of 30 both tens of nanometers high-accuracy and hundreds of millimeters long-range. 31

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