Abstract:Phase retrieval (PR) technology can reconstruct the complex amplitude information of the entrance pupil surface from the captured defocus intensity images, and has been successfully applied in many scientific fields such as astronomical observation, biomedical imaging and digital signal restoration. For low numerical aperture (NA) optical systems, the point spread function (PSF) can be calculated using the Fresnel diffraction propagation theory based on Fourier transform, ignoring the polarization field of the light field. However, for high-NA systems, the focal spot not only includes the transverse component, but also the longitudinal component accounts for a proportion that cannot be ignored, thus necessitating a vector model when calculating the PSF in the non-paraxial region. In this paper, the vector diffraction calculation model with arbitrary defocus distance based on the extended Nijboer-Zernike (ENZ) theory is established, which can characterize the light field components in three directions under the Cartesian coordinate system. What's more, a modified Gauss-Newton theory is innovatively applied to the axial phase difference PR model. Compared with the traditional first-order algorithm, the second-order algorithm can reduce the number of iterations. In addition, so as to verify the effectiveness of the proposed method, numerical simulations matching the physical model are carried out, the results show that the proposed method can accurately reconstruction the wavefront with high robustness. In conclusion, the established vector PR model in this paper would provide a creatively guidance for wavefront measurement of high-NA optical systems that is significant in the fields of semiconductor lithography, micro imaging and micro manipulation.

Vector diffraction theory for optical disk system

Vector Diffraction Analysis of Optical Disk Readout

Vector Diffraction and Polarization Effects in an Optical Disk System

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Application of Coupled-Wave Theory in Optical Disk

Effects of Pattern Parameters on the Optical Disk Readout Signals

Survey on the Scalar Diffraction Theory for the Optical Disk

Validity Analysis of Scalar Diffraction Theory in Optical System of Optical Disk

Computation of Effective Groove Depth in an Optical Disk with Vector Diffraction Theory.

Analytical Description of Sub-Diffraction Dark Spot

The Theoretical Consideration of the Readout System for the Photochromic Optical Disk

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High-density Optical Disk Structure Analysis with Finite–difference Time-Domain (FDTD) Method

Application of Vector Phase Retrieval Model in High Numerical Aperture Optical Systems

Beam Characteristic Analysis of Scalar Diffraction from Weakly Guiding Optical Fiber

Theoretical And Experimental Study Of Readouts Of Photochromic Optical Disks

Research of the Beam Steering Theory Based on Acousto-optic Effect

Readout Modeling And Calculation For Photochromic Optical Storage

Optical disk structure analysis with finite-difference time domain (FDTD) method

Computation Of The Effective Depth Of Grooves In An Optical Disk Using Vector Diffraction Theory

Analysis of the Polarization-Dependent Diffraction from a Metallic Grating by Use of a Three-Dimensional Combined Vectorial Method