PHASE CALIBRATING METHOD FOR PHASE-SHIFTING ADAPTER OF INTERFEROMETER

Yu Zhu,Jinbang Chen,Rihong Zhu,Lei Chen,Yuling Xiao
1999-01-01
Abstract:A phase calibrating method was proposed to calibrate the error of phase shifting adapter of interferometer. Fast Fourier transform (FFT) and linear polynomial fitting algorithms were used to rectify the nonlinearity of phase shifting adapter. And fringe patterns was changed to frequency domain by 1-D FFT and the noise was filtered by fringe processing method. Experiments show that the calibrating accuracy was 0. 5% on the condition of phase shifting being 5 steps.
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