XPS study on titanium and carbon plasma based ion implanted layers of GCr15 steel

Mingren Sun,LiFang Xia,Yue Sun,Xinxin Ma,Guang Li,Zhenxin Zhang
1999-01-01
Abstract:Ti and C mixed layers were grown with unbalanced Ti magnetron sputtering followed by carbon plasma based ion implantation on GCr15 bearing steel substrate. The XPS (X-ray photoelectron spectroscopy) observation shows that the carbon precipitates on the first surface layer and the carbon has a diamond-like structure which is further confirmed by Raman spectroscopy. Ti and C coexist underneath the carbon surface layer either in free atomistic state or in the form of TiC. The Ti and C contents decrease with the increase of layer depth.
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