Abstract:This work reports the structural effects on the focusing and imaging efficiency of 20–30 nm‐resolution zone plates at Diamond Light Source and Shanghai Synchrotron Radiation Facility. The zone width and the duty cycle were optimized using a modified beam‐propagation method for peak efficiency, and the effect of residual resist was also explored using simulation and experimental measurements.Hard X‐ray microscopes with 20–30 nm spatial resolution ranges are an advanced tool for the inspection of materials at the nanoscale. However, the limited efficiency of the focusing optics, for example, a Fresnel zone plate (ZP) lens, can significantly reduce the power of a nanoprobe. Despite several reports on ZP lenses that focus hard X‐rays with 20 nm resolution – mainly constructed by zone‐doubling techniques – a systematic investigation into the limiting factors has not been reported. We report the structural effects on the focusing and imaging efficiency of 20–30 nm‐resolution ZPs, employing a modified beam‐propagation method. The zone width and the duty cycle (zone width/ring pitch) were optimized to achieve maximum efficiency, and a comparative analysis of the zone materials was conducted. The optimized zone structures were used in the fabrication of Pt‐hydrogen silsesquioxane (HSQ) ZPs. The highest focusing efficiency of the Pt‐HSQ‐ZP with a resolution of 30 nm was 10% at 7 keV and >5% in the range 6–10 keV, whereas the highest efficiency of the Pt‐HSQ‐ZP with a resolution of 20 nm was realized at 7 keV with an efficiency of 7.6%. Optical characterization conducted at X‐ray beamlines demonstrated significant enhancement of the focusing and imaging efficiency in a broader range of hard X‐rays from 5 keV to 10 keV, demonstrating the potential application in hard X‐ray focusing and imaging.

Effect of focusing error and illumination with polychromatic light on zone plate light spot

Sharper Focal Spot below Λ/4 of Azimuthally Polarized Illumination Phase-Encoded by the Binary 0/π Phase Plate

Formation of Sub-Half-Wavelength Focal Spot with Ultra Long Depth of Focus

A study of structural effects on the focusing and imaging performance of hard X‐rays with 20–30 nm zone plates

Effects of Polarization and Phase Modulation on the Focal Spot in 4pi Microscopy

Electromagnetic Exploration of Focusing Properties of High-Numerical-aperture Micro-Fresnel Zone Plates

Performance Test of Fresnel Zone Plate with 50 nm Outermost Zone Width in Hard X-ray Region

Effects of the Condenser Fractal Zone Plate in a Transmission X-ray Microscope

Simulation of an X-ray Fresnel Zone Plate with Nonideal Factors

Plasmonic Microzone Plate: Superfocusing at Visible Regime

High-efficiency focusing and imaging by dielectric kinoform zone plate lenses with soft X-rays.

Analysis of Influence of 4 Fabrication Errors on X-ray Zone Plates by Summing Up Diffraction Fields

Design of the Synchrotron Light Spot Measurement System Based on Fresnel Zone Plate

Experimental study on optical field distribution of the soft X-ray linear monochromator

Defocused image restoration by an accurate optical transfer function of Fresnel zone plate in soft X-ray microscopy

Analysis of the influence of fabrication errors on the efficiency of X-ray zone plates by summing up the wavelets

The Realization of Long Focal Depth with A Linear Varied-Area Zone Plate

Use of Fractal Zone Plates for Transmission X-ray Microscopy

Linear Zone Plate Monochromator For Soft-X-Ray Microscopy

Investigation of Axial and Transverse Focal Spot Sizes of Fresnel Zone Plates.

Near-field behavior of zone-plate-like plasmonic nanostructures.