X-Ray Photoelectron Spectroscopy Study of the Deposition of Tio2 Thin Films on Self-Assembly Monolayer

ZD Xiao,D Huang,JH Gu,ZH Lu
DOI: https://doi.org/10.3866/pku.whxb19980111
1998-01-01
Acta Physico-Chimica Sinica
Abstract:X-ray photoelectron spectroscopy (XPS) was used to study the chemistry and film morphology during titanium oxide deposition from aqueous solution on functionalized surfaces prepared by oxidizing the end-functional groups self-resembled oil glass. The results show that mercaptopropyltrimethyoxysilane was successfully self-assembled on glass. Longer treatment of SAMs with hydrogen peroxide in acetic acid resulted in efficient conversion of the terminal group (SH-) to a sulfonate group. The deposition of thin films in TiCl4 solution of varied acidity gave different yields, and there are different oxidation states of Ti in the TiO2 thin film. The thin film showed excellent adhearence.
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