Multifractal behavior of electron scattering in solids

Hua Li,Zejun Ding,Ziqin Wu
1997-01-01
Journal of Trace and Microprobe Techniques
Abstract:The processes of electron scattering are simulated by a Monte Carlo method for a beam of electrons with 1 and 10 keV primary energies normally incident into the Si and Au solids. The spatial distribution of the energy dissipation sites of incident electrons, the spatial distribution of secondary electron birth sites, and the distribution of secondary electron emission sites on solid surfaces can be described quantitatively by multifractal spectra.
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