Effect of alignment error on binary optics element efficiency

Zheng,Yingbai Yan,Guofan Jin,Minxian Wu
1997-01-01
Abstract:Based on the theory of scalar diffraction, an error model is established to investigate the effect of alignment error on the efficiency of binary optics elements. Simple formulas of the relationship between alignment error and diffraction efficiency are obtained. Theoretical results are in good agreement with simulation results.
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