Analysis on the acoustic-load sensitivity of quartz crystal resonator

Yonggui Dong,Guanping Feng

1996-01-01

Abstract:Aiming at the sensitivity of the quartz crystal resonator (QCR) to the acoustic load, two generally applicable formulas on the relationship among the surface-state parameters of the QCR, its resonant resistance, and resonant frequency were derived based on a mechanical model of three-layer structure. From the theoretical analysis of gas-humidity sensor of QCR-type, it was found that both the resonant amplitude and frequency can be used as the detectable parameters. The resonant amplitude mainly reflects the surface damping; while the resonant frequency mainly reflects the surface mass-load, in the meanwhile, it can also be affected by the surface damping. Hence, attention should be paid seriously while developing sensors.