Design and realization of catalytic combustion-type gas sensor with sandwich dual bridge microstructure

Juntao Gu,Yongde Zhang,Jingang Jiang,Shutong Li

2014-01-01

Abstract:Aiming at the problems of traditional catalytic combustion-type gas sensor, such as matching difficulty, poor consistency, high power consumption and poor interchangeability due to manual manufacturing, in this paper a kind of integrated dual bridge catalytic combustion-type alcohol gas sensor is designed and manufactured based on silicon MEMS technology. With ANSYS finite element analysis method the temperature field of the sensor was analyzed, the silicon oxidation-PECVD-oxidation technique was adopted to produce the SiO2-Si3N2-SiO2 microstructure dual bridge carrier with sandwich structure, wet etching method was used to etch the silicon and form a beam structure for reducing the heat consumption. The thin film technology was used to manufacture the platinum film sensitive resistor, and the nano Al2O3-ZrO-ThO. was coated to form the sensor carrier, the Pt-Pd catalyst solution was dipped on the sensitive unit to form the catalytic sensitive bridge arm, the catalyst carrier without coating was used as the reference unit, the chip integration on the micro double bridge was realized, and the sensor was manufactured. The Pt film resistor lines were observed with the electron microscope, the compositions of the carrier sensitive material and compensation material were analyzed with energy spectrum method. The test results show that the sensor can realize the detection of alcohol with the volume fraction of 0-4 500��10-6, has good linear output characteristic; within the temperature range of 20-40��C and humidity range of 30%RH~85%RH, the maximum zero output of the sensor is less than ��2.0% FS, the power consumption is not larger than 0.2 W, both of the response and recovery time are less than 30 s.