Scheduling method for dual-blade multi-cluster tools with residency constraints

Binghai ZHOU,Mingxiang LIU,Shumei ZHOU
2014-01-01
Abstract:To improve the production efficiency of multi-cluster tools, modeling and scheduling problems of dual-blade multi-cluster tools with residency constraints and multi-type wafers were researched. Firstly, based on the proposed conception of virtual buffer modules, time interval sets were introduced to characterize the running states of the system. Then a non-linear mathematical model of the problems was formulated, and a scheduling algorithm was presented based on the conception of virtual buffer modules and the swap scheduling strategy. Finally, experiments were carried out to evaluate the proposed algorithm. Results indicated that, when scheduling a lot wafers, the running time of the constructed algorithm is only about 0.5 seconds, and the response time of the algorithm is also quick. Comparing a lower bound of the research problem domain, solutions are close to the lower bound. When the device factor is greater than 5, the cycle elongation R is less than 0.05. The algorithm achieves good results.
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