Abstract:Scheduling single-robotic-arm cluster tools subject to wafer residency time constraints has received much attention. Compared to some scheduling strategies that use all processing modules (PMs) to process wafers, it is much more challenging to schedule a more general case whose optimal scheduling strategy is not limited to the case of using all PMs. The strategy of only adjusting the robot’s waiting time may fail to produce a desired schedule. When a tool using all PMs is not schedulable, it may become schedulable if only some PMs of a type are used. Therefore, it is very important to select an appropriate number of PMs to process wafers. This work studies the cyclic scheduling problem of wafer-residency-time-constrained single-robotic-arm cluster tools by simultaneously adjusting the number of PMs and robot waiting time. We build a virtual cell that includes an appropriate number of PMs to process wafers with the maximal productivity. We establish sufficient and necessary conditions under which the system is schedulable. The schedulability conditions are less conservative than the state-of-the-art one. A polynomial algorithm is developed to find the optimal cyclic schedule, a virtual cell’s configuration, and robot waiting time. We illustrate the practicability of the proposed algorithm via several examples, and its superiority over the existing one. Note to Practitioners—This paper addresses the optimal cyclic scheduling problem of wafer-residency-time-constrained single-robotic-arm cluster tools that are used in every wafer fabrication factory. This work for the first time simultaneously adjusts the number of PMs and the robot waiting time given such a cluster tool such that it can be scheduled with the highest productivity. It presents the optimal scheduling method with polynomial complexity. We confirm that the proposed approach can improve schedulability of single-robotic-arm cluster tools over existing methods by using multiple examples. It can thus be readily applied to industrial wafer fabrication.

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Real-Time Scheduling and Control of Single-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation by Using Resource-Oriented Petri Nets

Scheduling of Single-Arm Multi-cluster Tools with Wafer Residency Time Constraints in Semiconductor Manufacturing

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Scheduling and Optimization of Mixed-Processing with Multi-Variety Wafers in Dual-Armed Cluster Tools

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Petri Net-Based Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools in Semiconductor Manufacturing

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Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools

Optimally Scheduling Dual-Arm Multi-Cluster Tools to Process Two Wafer Types

Scheduling Of Single-Arm Multi-Cluster Tools To Achieve The Minimum Cycle Time

Scheduling Algorithm of Dual-Armed Cluster Tools with Residency Time and Reentrant Constraints

Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints

Schedulability Analysis for Dual-Armed Cluster Tools with Mixed-Processing of Multi-Variety Wafers

Optimally Scheduling Single-Arm Multicluster Tools for Manufacturing Hybrid-Type Wafers

Cyclic scheduling of cluster tools with equipment front-end module and multifunctional load locks

Scheduling and Control of Startup Process for Single-Arm Cluster Tools with Residency Time Constraints

Noncyclic Scheduling of Multi-Cluster Tools with Residency Constraints Based on Pareto Optimization

Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools with Wafer Revisiting and Activity Time Disturbance

Scheduling of Single-Arm Cluster Tools with Residency Time Constraints and Chamber Cleaning Operations