Growth and fabrication of sputtered TiO2 based ultraviolet detectors

Huolin Huang,Yannan Xie,Zifeng Zhang,Feng Zhang,Qiang Xu,Zhengyun Wu
DOI: https://doi.org/10.1016/j.apsusc.2013.12.142
IF: 6.7
2014-01-01
Applied Surface Science
Abstract:•Metal-semiconductor-metal (MSM) structure detectors with diverse finger spacings were fabricated on the sputtered TiO2 films.•High quality TiO2 films and good Au/TiO2 Schottky contacts were achieved.•The detectors exhibit lower dark current and higher UV-to-visible rejection ratio.•The mechanism of diverse finger spacing on the device performances is analyzed.•The detectors are promising in commercial production due to low cost and ease of fabrication process.
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