A High-Performance Ultraviolet Photoconductive Detector Based on a ZnO Film Grown by RF Sputtering

Zhen Bi,Jingwen Zhang,Xuming Bian,Dong Wang,Xin’an Zhang,Weifeng Zhang,Xun Hou
DOI: https://doi.org/10.1007/s11664-007-0329-8
IF: 2.1
2007-01-01
Journal of Electronic Materials
Abstract:high-performance metal-semiconductor-metal (MSM) ultraviolet photodetector was fabricated based on a ZnO film with Al interdigitated (IDT) electrodes. A c -axis-oriented ZnO film was grown on a SiO 2 /Si (100) substrate at room temperature by a reactive radiofrequency (RF) sputtering technique and then annealed at 900°C in pure O 2 ambient for 1 h. The fabricated ZnO ultraviolet (UV) detector demonstrated a high responsivity of 2069 A/W when biased at 5 V, which could be attributed to the influence of the annealing process in pure O 2 ambient. The response time measurement showed a rise time (10–90%) of 45.1 ns and a decay time (1 − 1/ e ) of 541 μ s.
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