Effect of Annealing on the Structural, Magnetic and Surface Energy of CoFeBY Films on Si (100) Substrate
Wen-Jen Liu,Yung-Huang Chang,Yuan-Tsung Chen,Yi-Chen Chiang,Yu-Chi Liu,Te-Ho Wu,Po-Wei Chi
DOI: https://doi.org/10.3390/ma14040987
IF: 3.4
2021-02-19
Materials
Abstract:The structure, magnetic properties, optical properties and adhesion efficiency of CoFeBY films were studied. Co40Fe40B10Y10 alloy was sputtered onto Si (100) with a thickness of 10–50 nm, and then annealed at room temperature, 100 °C, 200 °C and 300 °C for 1 h. X-ray diffraction (XRD) showed that the CoFeBY films deposited at room temperature are amorphous. Annealing at 100 °C gave the films enough thermal energy to change the structure from amorphous to crystalline. After annealing, the CoFeBY thin film showed a body-centered cubic (BCC) CoFeB (110) characteristic peak at 44°. However, the low-frequency alternative-current magnetic susceptibility (χac) and saturation magnetization (MS) increased with the increase of thickness. CoFeBY thin films had the highest χac and MS after annealing at 300 °C compared to that at other temperatures. After annealing at 300 °C, the surface energy of CoFeBY film is the maximum at 50 nm. Higher surface energy indicated stronger adhesion.
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering