Abstract:Recent trends of interferometric wavefront sensing tend to focus on high precision, anti-vibration, compact, along with much more involved of electric and computer technology. And the optical principles employed not only limit to interference but also include diffraction, scattering, polarization, etc. In this paper, some selected examples basing on the research works in our group will be given to illustrate the trends mentioned above. To achieve extra high accuracy, phase-shifting point diffraction interferometry (PS-PDI) is believed to be a good candidate as it employs a nearly perfect point diffraction spherical wavefront as the reference and also takes advantage of the high precision of phase-shifting algorithms. Cyclic radial shearing interferometry (C-RSI) successively demonstrate the anti-vibration characteristic and can diagnose transient wavefront with only one single shot by employing a three-mirror common-path configuration and a synchronizing system. In contrast sharply with those early interferometers, interferometers with very compact configuration are more suitable to develop portable wavefront sensing instruments. Cross-grating lateral shearing interferometer (CG-LSI) is a very compact interferometer that adopts a cross-grating of millimeters to produce lateral shearing of the diffraction wave of the test wavefront. Be aware that, computer technique has been used a lot in all of the above interferometers but the non-null annual sub-aperture stitching interferometer (NASSI) for general aspheric surface testing mostly relies on the computer model of the physical interferometer setup and iterative ray-tracing optimization. The principles of the above mentioned interferometric wavefront sensing methods would be given in detail.

Study of calibration method of radial shearing interferometry

System Optimization of Radial Shearing Interferometer for Aspheric Testing

Radial Shearing Jamin Interferometer with Variable Carrier Frequency

Interferometry Measurement Of Parallel Optical Plate Wavefront

A Novel Method for Angular Vibration Calibration Based on a Retroreflection Film Laser Interferometer and a Rotary Encoder

Development and Calibration of a Radial-Shearing Interferometer

Self-calibration of Fizeau interferometer and planar scale gratings in Littrow setup.

Aberration Calibration in High-Na Spherical Surfaces Measurement on Point Diffraction Interferometry

Multi-Directional Lateral Shearing Interferometer Based on Rotatable Prism Pairs

Accurate Phase Retrieval Algorithm Based on Linear Correlation in Self-Calibration Phase-Shifting Interferometry with Blind Phase Shifts

Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization

Calibrate the Non-Orthogonal Error of AFM with Two-Dimensional Self-Traceable Grating.

Off-axis Cyclic Radial Shearing Interferometer for Measurement of Centrally Blocked Transient Wavefront.

Practical and Accurate Method for Aspheric Misalignment Aberrations Calibration in Non-Null Interferometric Testing

Infinite element model for the reconstruction of two-dimensional shearing wavefront

Calibration Method for High-Accuracy Measurement of Long Focal Length with Talbot Interferometry.

Calibration for the Errors Resulted from Aberration in Long Focal Length Measurement

Wave-Front Reconstruction For Lateral Shearing Interferometers With Big Shear

Aspherical Surface Wavefront Testing Based on Multi-Directional Orthogonal Lateral Shearing Interferometry

Improving the Accuracy of Interferometer Testing with Absolute Surface Calibration and Power Spectral Density Analysis

Recent Developments of Interferometric Wavefront Sensing