Vibration Damping of Magnetic Bearing Turbo Molecular Pump

张剀,戴兴建,张小章,武涵,邹蒙,李奇志
DOI: https://doi.org/10.3969/j.issn.1672-7126.2013.06.10
2013-01-01
Abstract:The vibration modes, co-existing simultaneously in a prototyped 2000 L turbo molecular pump suspended by the active magnetic bearings, were preliminarily identified as: the pump-motor bending resonance mode, rotor dynamic instability caused by rotor gyroscopic effect, chatter vibration of the pump blade, and vibrations from the complicated dynamic interactions of the rotor and the pump-motor. Novel types of vibration controller design were developed to effectively damp the above-mentioned vibrations. For example, the cross feedback control method eliminates the gyroscopic effect; and the phase-shaping control schemes, with different phase-shaping filters, significantly suppress the vibrations originated from other non-gyroscopic sources. The test results show that the newly-developed vibration controller makes it possible to steadily accelerate the rotor to the fastest speed of 24000 r/min, and that the pump involved lives up to all the technical expectations.
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