Optical and microstructural properties of ZnO/TiO 2 nanolaminates prepared by atomic layer deposition

Yu-Zhu Gu,Hong-Liang Lu,Yang Geng,Zhi-Yuan Ye,Yuan Zhang,Qing-Qing Sun,Shi-Jin Ding,David Wei Zhang

DOI: https://doi.org/10.1186/1556-276X-8-107

2013-01-01

Nanoscale Research Letters

Abstract:ZnO/TiO 2 nanolaminates were grown on Si (100) and quartz substrates by atomic layer deposition at 200°C using diethylzinc, titanium isopropoxide, and deionized water as precursors. All prepared multilayers are nominally 50 nm thick with a varying number of alternating TiO 2 and ZnO layers. Sample thickness and ellipsometric spectra were measured using a spectroscopic ellipsometer, and the parameters determined by computer simulation matched with the experimental results well. The effect of nanolaminate structure on the optical transmittance is investigated using an ultraviolet–visible-near-infrared spectrometer. The data from X-ray diffraction spectra suggest that layer growth appears to be substrate sensitive and film thickness also has an influence on the crystallization of films. High-resolution transmission electron microscopy images show clear lattice spacing of ZnO in nanolaminates, indicating that ZnO layers are polycrystalline with preferred (002) orientation while TiO 2 layers are amorphous.